F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems Revision:SEMI F74-1103 - Superseded illustrate

illustrate

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1-0304 (technical revision)

inspection and measurement used in backlight unit industry as well as panel and instrument industry

• Equipment recipe components and recipe steps contained in the recipe components as they apply to process modules

F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems Revision:SEMI F74-1103 - Superseded illustrateThis document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface mounted gas systems and conventional metal face seal fitting systems. Referenced SEMI Standards SEMI E49 Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components