S02700 - SEMI S27 - 針對環境、安全與衛生(ESH)評估報告內容之安全指導方針 StdPbc-0211 SEMI E77-0998 (first published)

SEMI E77-0998 (first published)

2  Both organizations producing depositions internally for in-house use and companies manufacturing depositions for sale can apply this Test Method to ensure that their particle deposition systems provide depositions that meet the requirements of SEMI M52

SEMI E94-0713 (technical revision)

dry Si wafers that are supported by a mechanism that move the test specimen through the measurement equipment

equipment and facilities relating to manufacturing

S02700 - SEMI S27 - 針對環境、安全與衛生(ESH)評估報告內容之安全指導方針 StdPbc-0211 SEMI E77-0998 (first published)(Environmental Health & Safety Technical Committee)2009121620102www. semi. org SEMI(ME) SEMI Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S7 Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications SEMI S8 Safety Guidelines for Ergonomics Engineering of Semiconduct