M02600 - SEMI M26 - ウェーハの運搬に使用される100 mm，125 mm，150 mm，200 mmウェーハシッピングボックスの再利用ガイド Revision:SEMI M26-0304 (Reapproved 1110) - Inactive Referenced SEMI Standards (purchase separately)SEMI

Referenced SEMI Standards (purchase separately)SEMI A1 — Specification for Horizontal Communication (HC) Between Equipment for Factory Automation System

Peel strength of protective film from leadframe tape (see SEMI G75

Wafers meeting the basic specification requirements herein are suitable for use as ‘mechanical handling’ wafers for equipment set-up and robotic handling applications

The purpose of this guideline is to provide a baseline for publications of EB resist parameters

org April 2001

M02600 - SEMI M26 - ウェーハの運搬に使用される100 mm，125 mm，150 mm，200 mmウェーハシッピングボックスの再利用ガイド Revision:SEMI M26-0304 (Reapproved 1110) - Inactive Referenced SEMI Standards (purchase separately)SEMIglobal Silicon Wafer Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199520043 100 mm125 mm150 mm200 mm 100 mm125 mm150 mm200 mm Referenced SEMI Standards SEMI M31 Mechanical Specification for Front Opening Shipping Box Used to Transport and Ship 300 mm Wafers SEMI M45 Specification for 300 mm Wafer Shipping System