PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty it doesn’t restrict specific means
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Description
it doesn’t restrict specific means of writing
top semiconductor IDMs
SEMI D20-93E (editorial revision)
and semiconductor testing processes
The purpose of this Standard is to specify mechanical features for the 450 mm wafer tape frame cassette used between the wafer mounting process and the die-bonding process
PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty it doesn’t restrict specific meansNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI A1. The purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered
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