D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 SEMI C2 — Specifications for

SEMI C2 — Specifications for Etchants

Method A is recommended for examining the edge profile of flatted regions of the wafer

reduces stray light

The nominal volume of the canister which is over 40 liters is exempted from the scope

provide a map between EFEM functional elements and existing standards

D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 SEMI C2 — Specifications forglobal Flat Panel Display Color Filters & Optical Elements Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM1995200111 FPDCFCF Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D20 Terminology for FPD Mask Defect SEMI D21 Terminology for FPD Mask Pattern Accuracy SEMI M21 Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array