FH00100 - SEMI FH1 - Test Method of Line Impedance for Electronic Textiles StdPbc-0523 3-0698 (Reapproved 1110)

3-0698 (Reapproved 1110)

本文書の範囲は自動およびマニュアルのレチクルポッド搬送，レチクルポッドへ／からのレチクル搬送，装置内でのレチクルの移動，ReticleIDの識別および検証，レチクルの検査および認証，およびレチクル使用度のトラッキングについてホストが情報を得てその役割を果たすのを容易にするようなスタンダードを定義することである。具体的にいうと，本文書では下記に関するホストと装置の相互作用を定義する状態モデルおよびシナリオを規定している：

SEMI E10-86 (first published)

All measurement techniques are performed using an inductive-coil (eddy-current) sensor energized at a radio frequency and an illumination source

Learners gain hands-on knowledge of the full rapid prototyping workflow-from the design concept and engineering drawings to the integration of electronics and the use of CNC machines

FH00100 - SEMI FH1 - Test Method of Line Impedance for Electronic Textiles StdPbc-0523 3-0698 (Reapproved 1110)The conductive traces, paths or wires are an important configuration for the circuit layout and signal processing, and that are applied to electronic textiles. A new kind of textile transmission line that might be widely used, among others, in smart clothing. This line consists of a flexible substrate with conductive traces, paths or wires. The line impedance measurement is an important method for ensuring the fabric wire quality in incoming quality